Search Type: US Issued Patents
aclm/plasma AND aclm/film AND aclm/vanadium

Classification Number Url PMD Priority Assignee Assignee Loc Inventor(s) Inventor Loc(s) Filing Date Issued Date
classification-0 6,156,395 Plasma enhanced chemical vapor deposition (PECVD) method of forming vanadium oxide films and vanadium oxide thin-films prepared thereby 6,156,395
Yes
Midwest Research InstituteKansas City, MOZhang; Ji-Guang:Tracy; C. Edwin:Benson; David K.:Turner; John A.:Liu; PingGolden, CO:Golden, CO:Golden, CO:Littleton, CO:Lakewood, COJune 3, 1999December 5, 2000