Search Type: US Issued Patents

NOT aclm/film AND aclm/superconduct$ AND aclm/plasma AND spec/film

Classification	Number	Url	PMD	Priority	Assignee	Assignee Loc	Inventor(s)	Inventor Loc(s)	Filing Date	Issued Date
	6,756,285	Multilayer structure with controlled internal stresses and making same	6,756,285	No	Commissariat a l'Energie Atomique	Paris, FR	Moriceau; Hubert:Rayssac; Olivier:Cartier; Anne-Marie:Aspar; Bernard	St-Egreve, FR:Grenoble, FR:Le Genevrey, FR:Rives, FR	January 9, 2002	June 29, 2004
	6,699,820	Method for making a superconductor with enhanced current carrying capability	6,699,820	No	n/a	n/a	Bielefeldt; Hartmut Ulrich:Gotz; Barbel Martha:Hammerl; German:Hilgenkamp; Johannes Wilhelmus Maria:Mannhart; Jochen Dieter:Schmehl; Andreas Fritz Albert:Schneider; Christof Walter:Schulz; Robert Ralf	Marconi-Str. 10, D-86179 Augsburg, DE:Agnes-Bernauer-Str. 52, D-86159 Augsburg, DE:Ludwig-Thoma-Str. 5, D-86672 Thierhaupten, DE:Boterbloem 7, NL-7623 CD Borne, NL:Edelweissring 46, D-86343 Konigsbrunn, DE:Webersteig 20, D-86738 Deiningen, DE:Tannenstrasse 3, D-86343 Konigsbrunn, DE:Messerschmitt-Strasse 33b, D-86159 Augsburg, DE	March 2, 2001	March 2, 2004
	6,348,757	Reinforced supraconductive material, supraconductive cavity, and methods for making same	6,348,757	No	Centre National de la Recherche Scientifique	Paris, FR	Marini; Jean	Marly le Roi, FR	June 23, 2000	February 19, 2002
	6,284,713	Method of oxygenating oxide superconductive materials	6,284,713	Yes This application is a continuation of U.S. application Ser. No.: 08/713,660, filed Sep. 13, 1996, now U.S. Pat. No. 6,153,561, which is incorporated herein by reference.	The Ohio State University	Columbus, OH	Sandhage; Kenneth H.	Upper Arlington, OH	October 3, 2000	September 4, 2001
	6,258,287	Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment	6,258,287	Yes RELATED APPLICATIONS This document claims priority to and the benefit of the filing date of Provisional patent application Ser. Nos. 60/026,985, filed Sep. 20, 1996, entitled "APPARATUS AND PROCESS FOR LOW-DAMAGE DRY ETCHING OF INSULATORS BY LOW ENERGY ELECTRON ENHANCED ETCHING IN A DC PLASMA"; 60/026,587, filed Sep. 20, 1996, entitled "APPARATUS AND PROCESS FOR LOW-DAMAGE DRY ETCHING OF INSULATORS BY LOW ENERGY ELECTRON ENHANCED ETCHING IN AN AC PLASMA"; and a C-I-P of U.S. patent application Ser. No. 08/705,902, filed on Aug. 28, 1996 now U.S. Pat. No. 5,882,538 entitled "METHOD AND APPARATUS FOR LOW ENERGY ELECTRON ENHANCED ETCHING OF SUBSTRATES".	Georgia Tech Research Corporation	Atlanta, GA	Martin; Kevin P.:Gillis; Harry P.:Choutov; Dmitri A.	Atlanta, GA:Los Angeles, CA:Santa Clara, CA	September 17, 1997	July 10, 2001
	6,153,561	Method for oxygenating oxide superconductive materials	6,153,561	No	The Ohio State University	Columbus, OH	Sandhage; Kenneth H.	Upper Arlington, OH	September 13, 1996	November 28, 2000
	6,110,336	High pressure magnetron cathode assembly and sputtering apparatus utilizing same	6,110,336	No	Forschunszentrum Julich GmbH	Julich, DE	Wordenweber; Roger:Ockenfuss; Georg:Schneider; Jens:Klein; Wilfried	Niederzier, DE:Santa Rosa, CA:Julich, DE:Julich, DE	August 10, 1998	August 29, 2000
	6,066,600	Method of making high-T.sub.c SSNS and SNS Josephson junction	6,066,600	Yes This application is a division of application Ser. No. 08/761,412, filed on Dec. 6, 1996, now U.S. Pat. No. 5,892,243.	TRW Inc.	Redondo Beach, CA	Chan; Hugo W.	Palos Verdes Estates, CA	January 22, 1998	May 23, 2000
	5,882,538	Method and apparatus for low energy electron enhanced etching of substrates	5,882,538	No	Georgia Tech Research Corporation	Atlanta, GA	Martin; Kevin P.:Gillis; Harry P.:Choutov; Dmitri A.	Atlanta, GA:Los Angeles, CA:Marietta, GA	August 28, 1996	March 16, 1999
	5,814,122	Method of making hollow high temperature ceramic superconducting fibers	5,814,122	No	Owens-Corning Fiberglas Technology, Inc.	Summit, IL	Huang; Jianzhong	Westerville, OH	December 12, 1995	September 29, 1998
	5,804,027	Apparatus for generating and utilizing magnetically neutral line discharge type plasma	5,804,027	No	Nihon Shinku Gijutsu Kabushiki Kaisha	Chigasaki, JP	Uchida; Taijiro	Chigasaki, JP	February 6, 1997	September 8, 1998
	5,640,010	Mass spectrometer for macromolecules with cryogenic particle detectors	5,640,010	No	n/a	n/a	Twerenbold; Damian	Case Postale 120, CH-2017 Boundry, CH	May 11, 1995	June 17, 1997
	5,635,454	Method for making low density ceramic composites	5,635,454	Yes This application is a divisional application based upon U.S. patent application Ser. No. 07/404,015, filed Mar. 13, 1995, now U.S. Pat. No. 5,587,228, which is a division of application Ser. No. 08/124,419, filed July, 28, 1993, now U.S. Pat. No. 5,441,682, which is a continuation of application based upon U.S. patent application Ser. No. 07/527,600, filed May 23, 1990, now abandoned, which is a continuation-in-part of U.S. patent application Ser. No. 07/381,498, filed Jul. 18, 1989, now abandoned, which in turn is a continuation-in-part of U.S. patent application Ser. No. 06/698,496, filed Feb. 5, 1985, now U.S. Pat. No. 5,041,321, which in turn is a continuation-in-part of U.S. patent application Ser. No. 06/667,496, filed Oct. 18, 1984, now U.S. Pat. No. 4,634,918, all of which are incorporated by reference.	The Boeing Company	Seattle, WA	Baker; Anna L.:Garrigus; Darryl F.	Seattle, WA:Seattle, WA	June 5, 1995	June 3, 1997
	5,571,778	Superconducting junction material and process of preparing same	5,571,778	No	Superconductivity Research Laboratory of International Superconductivity:Sharp Corporation	JP:JP	Fujimoto; Manabu:Suzuki; Katsumi:Enomoto; Youichi:Tanaka; Shoji	Osaka, JP:Tokyo, JP:Tokyo, JP:Tokyo, JP	March 30, 1995	November 5, 1996
	5,498,595	Method of activation of superconductors and devices produced thereby	5,498,595	Yes This is a continuation of application Ser. No. 08/35,899, filed on Mar. 23, 1993, which was abandoned upon the filing hereof abandoned and which was a continuation of 07/634,861 filed Jan. 2, 1991 which was also abandoned.	British Technology Group Limited	London, GB2	Eccleston; William	Liverpool, GB2	August 16, 1994	March 12, 1996
	5,376,628	Method of improving or producing oxide superconductor	5,376,628	Yes This application is a continuation-in-part of application Ser. No. 611,434 filed Nov. 13, 1990, now abandoned, which is a continuation of application Ser. No. 373,368 filed Jun. 29, 1989, now abandoned.	Anelva Corporation	Tokyo, JP	Sekiguchi; Atsushi:Mito; Hideo	Fuchu, JP:Fuchu, JP	March 9, 1992	December 27, 1994
	5,290,758	Plasma-assisted deposition process for producing a thin layer on a substrate	5,290,758	No	Forschungszentrum Julich GmbH	Julich, DE	Wordenweber; Roger	Niederzier, DE	March 10, 1992	March 1, 1994
	5,231,077	Active device having an oxide superconductor and a fabrication process thereof	5,231,077	No	Nobuo Sasaki	Kanagawa, JP	Sasaki; Nobuo	Kawasaki, JP	August 8, 1991	July 27, 1993
	5,196,400	High temperature superconductor deposition by sputtering	5,196,400	No	AT&T Bell Laboratories	Murray Hill, NJ	Chen; Chiou T.:Krause; Dennis L.	Atkinson, NH:Atkinson, NH	August 17, 1990	March 23, 1993
	5,179,073	Method of shaping superconducting oxide material	5,179,073	Yes This is a continuation application of Ser. No. 07/564,681 filed Aug. 7, 1990, now abandoned, which is a continuation application of Ser. No. 07/252,591 filed Oct. 3, 1988, now abandoned.	Semiconductor Energy Laboratory Co., Ltd.	Kanagawa, JP	Yamazaki; Shunpei	Tokyo, JP	October 23, 1991	January 12, 1993
	5,157,581	Conductive ceramics, conductors thereof and methods	5,157,581	No	Elmwood Sensors Limited	Tyne & Wear, GB3	Hashemi; Tooraj	Belmont, GB	November 13, 1990	October 20, 1992
	5,120,703	Process for preparing oxide superconducting films by radio-frequency generated aerosol-plasma deposition in atmosphere	5,120,703	No	Alfred University	Alfred, NY	Snyder; Robert L.:Wang; Xingwu:Zhong; Honghai	Alfred, NY:Alfred, NY:Alfred, NY	April 17, 1990	June 9, 1992
	5,034,372	Plasma based method for production of superconductive oxide layers	5,034,372	No	Mitsubishi Denki Kabushiki Kaisha	Tokyo, JP	Matsuno; Shigeru:Kubo; Yoshio:Yoshizaki; Kiyoshi:Wakata; Mitsunobu:Miyashita; Syouji:Fujiwara; Fumio	Amagasaki, JP:Amagasaki, JP:Amagasaki, JP:Amagasaki, JP:Amagasaki, JP:Amagasaki, JP	December 7, 1988	July 23, 1991
	4,967,639	Rapid burst firing electromagnetic launcher	4,967,639	No	Westinghouse Electric Corp.	Pittsburgh, PA	Hughes; William F.:Kemeny; George A.:Young; Frederick J.	Cambridge Springs, PA:Wilkins Twp., PA:State College, PA	July 15, 1982	November 6, 1990
	4,904,882	Superconducting optical switch	4,904,882	Yes This is a divisional of co-pending application Ser. No. 07/252,486 filed on Sept. 30, 1988. With respect to the prior co-pending U.S. application from which this application claims benefit under 35 USC 120, the inventor in this application is the same. The inventorship for all the claims in this application is the same.	The United States of America as represented by the Secretary of the Navy	Washington, DC	Szu; Harold H.	Bethesda, MD	December 27, 1988	February 27, 1990
	4,901,621	Superconducting projectile for a rail gun and the combination of a rail gun with a superconducting projectile	4,901,621	No	GT-Devices	Alexandria, VA	Tidman; Derek A.	Silver Spring, MD	July 9, 1987	February 20, 1990
	4,828,664	Process for the production of a niobium oxycarbonitride superconducting fiber bundle	4,828,664	Yes This is a division of application Ser. No. 677,176, filed Dec. 3, 1984, now U.S. Pat. No. 4,657,776, which is a divisional of Ser. No. 518,381, filed July 29, 1983, now U.S. Pat. No. 4,581,289.	Brown, Boveri & Cie AG:Kernforschungszentrum Karlsruhe GmbH	Mannheim, DE:Essenstein-Leopoldshafen, DE	Dietrich; Manfred:Dustmann; Cord-Heinrich:Schmaderer; Franz:Wahl; Georg F. H.	Karlsruhe, DE:Weinheim, DE:Heidelberg, DE:Eppelheim, DE	March 25, 1987	May 9, 1989
	4,727,550	Radiation source	4,727,550	No	n/a	n/a	Chang; David B.:McDaniel; James C.:Moise; Norton L.:Salisbury; Winfield W.:Shih; I-Fu	14212 Livingston St., Tustin, CA 92680:626 N. Clementine, Anaheim, CA 92805:1674 Palisades Dr., Pacific Palisades, CA 90272:10925 Wedgewood Dr., Sun City, AZ 85351:4656 Fir Ave., Seal Beach, CA 90740	September 19, 1985	February 23, 1988
	4,657,776	CVD process for the production of a superconducting fiber bundle	4,657,776	Yes This is a division of application Ser. No. 518,381, filed July 29, 1983, U.S. Pat. No. 4,581,289.	Brown, Boveri & Cie AG:Kernforschungs-Zentrum Karlsruhe GmbH	Mannheim, DE:Eggenstein-Leopoldshafen, DE	Dietrich; Manfred:Dustmann; Cord-Heinrich:Schmaderer; Franz:Wahl; Georg F. H.	Karlsruhe, DE:Weinheim, DE:Heidelberg, DE:Eppelheim, DE	December 3, 1984	April 14, 1987
	4,642,571	Microwave pulse source	4,642,571	No	Tokyo Institute of Technology	Tokyo, JP	Minami; Kazuo:Awano; Mitsuru	Yokohama, JP:Tokyo, JP	July 10, 1985	February 10, 1987
	4,589,961	Aluminum mask anodization with lift-off for patterning Josephson junction devices	4,589,961	No	Sperry Corporation	New York, NY	Gershenson; Meir	St. Paul, MN	August 31, 1984	May 20, 1986
	4,439,269	Method for making Josephson junctions with contamination-free interfaces utilizing a ZnO contact insulator	4,439,269	No	The United States of America as represented by the Secretary of the Navy	Washington, DC	Cukauskas; Edward J.	Vienna, VA	September 30, 1982	March 27, 1984
	4,000,036	Plasma control and utilization	4,000,036	Yes This application is a continuation-in-part of application Ser. No. 67,697, filed Aug. 28, 1970, now abandoned.	The United States of America as represented by the Energy Research and	Washington, DC	Ensley; Donald L.	Danville, CA	January 21, 1971	December 28, 1976